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Plasma production of trichorosilane, SiHCl.sub.3

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process and apparatus for removing Bronsted acid impurities...

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
Reexamination Certificate

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Process for filling and emptying a vessel charged with...

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for hydrogenation of tetrachlorosilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for increasing the percentage of silicon tetrachloride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for preparing chloropolysilanes

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for preparing chlorosilanes from silicon and hydrogen ch

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for preparing trichloromonosilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for preparing trichlorosilane and silicon tetrachloride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for producing hexachlorodisilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for producing silicon tetrafluoride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for producing silicon tetrafluoride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for producing trichlorosilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for purifying halogenosilanes

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for removal of water and silicon mu-oxides from chlorosi

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for removing aluminum and other metal chlorides from...

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for silicon and trichlorosilane production

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for the dismutation of chlorosilanes

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for the disproportionation of chlorosilanes

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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Process for the hydrochlorination of elemental silicon

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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