Process for hydrogenation of tetrachlorosilane

Details Process for hydrogenation of tetrachlorosilane Process for hydrogenation of tetrachlorosilane

1994-01-28

1995-06-06

Straub, Gary P.

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

423347, C01B 33107

Patent

active

054220882

ABSTRACT:
An improved process for contacting hydrogen gas and tetrachlorosilane in a reactor comprising a pressurizable shell having located therein a reaction vessel forming a substantially closed inner chamber for reacting the hydrogen gas with the tetrachlorosilane. The improvement comprises feeding to an outer chamber between the pressurizable shell and the reaction vessel a gas or gaseous mixture having a chlorine to silicon molar ratio greater than about 3.5. The improvement reduces the concentration of hydrogen and tetrachlorosilane in the outer chamber that results from leakage of these gases from the substantially closed inner chamber and the detrimental reactions associated with such leakage on structural elements and performance of the reactor.

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patent: 4217334 (1980-08-01), Weigert et al.
patent: 4836997 (1989-06-01), Lepage et al.
patent: 5126112 (1992-06-01), Burgie

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