Process for preparing trichloromonosilane

Details Process for preparing trichloromonosilane Process for preparing trichloromonosilane

2005-04-01

2011-10-25

Nguyen, Ngoc-Yen (Department: 1734)

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

C423S341000

Reexamination Certificate

active

08043591

ABSTRACT:
A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-form silicon and the silicon dust is introduced directly into the reactor.

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Ullmann'S Encyclopedia of Industrial Chemistry, 2002, vol. A23, pp. 724-726.

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