Process for removal of water and silicon mu-oxides from chlorosi

Details Process for removal of water and silicon mu-oxides from chlorosi Process for removal of water and silicon mu-oxides from chlorosi

1991-07-29

1992-03-10

Maples, John S.

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

423210, 252194, 502152, 502157, 502402, 502407, 502415, 55 35, C01B 33107

Patent

active

050948300

ABSTRACT:
A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising:

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