Process for producing trichlorosilane

Details Process for producing trichlorosilane Process for producing trichlorosilane

1997-09-16

1999-02-16

Nguyen, Ngoc-Yen

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

423341, C01B 33107

Patent

active

058717056

ABSTRACT:
A process for producing trichlorosilane by reacting silicon with hydrogen chloride, which comprises bringing at least one silane compound selected from the group consisting of dichlorosilane, monochlorosilane and monosilane into contact with silicon during or prior to a reaction between silicon and hydrogen chloride to remove silicon oxide on the surface of silicon, thereby improving the reactivity of silicon with hydrogen chloride to produce silicon trichloride stably. Further, an alkali metal compound is co-present in the reaction between silicon and hydrogen chloride to suppress the production of silicon tetrachloride, thereby making it possible to produce trichlorosilane at a high selectivity.

REFERENCES:
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patent: 3681036 (1972-08-01), Schwarz et al.
patent: 4044109 (1977-08-01), Kotzsch et al.
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4585643 (1986-04-01), Barker, Jr.
patent: 4986971 (1991-01-01), Forwald et al.
patent: 5063040 (1991-11-01), Ruff

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