Process for producing silicon tetrafluoride

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing

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C01B 3308

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046158723

ABSTRACT:
A process for producing silicon tetrafluoride by hydrolysis of gases containing silicon fluoride, the hydrolysate being reacted with sodium fluoride, potassium fluoride and/or barium fluoride and the reaction product obtained decomposed thermally, thereby forming silicon tetrafluoride.

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