Device for treating silicon wafers

Device for turning a wafer during a wet etching process

Device for vacuum coating slide bearings

Device to generate excited/ionized particles in a plasma

Devices and methods for optical endpoint detection during...

Diagnostic head assembly for plasma chamber

Diamond coated parts in a plasma reactor

Die pickup apparatus for picking up semiconductor dies and...

Dielectric etch chamber with expanded process window

Differential pressure application apparatus for use in...

Differential pressure application apparatus for use in...

Direct detection of dielectric etch system magnet driver and...

Direct vapor delivery of enabling chemical for enhanced HF...

Directed gas injection apparatus for semiconductor processing

Discharge electrode and process chamber of dry etching facility

Discharge plasma processing device

Distributed control system for semiconductor manufacturing...

Distributed system and code for control and automation of plasma

Disturbance-free, recipe-controlled plasma processing system...

Disturbance-free, recipe-controlled plasma processing system...