Cluster tool and method for process integration in...
Cluster tool apparatus using plasma immersion ion implantation
CMP apparatus polishing head with concentric pressure zones
CMP slurry atomization slurry dispense system
CMP uniformity
Coaxial dressing for chemical mechanical polishing
Coaxial plasma processing apparatus
Cobalt silicide etch process and apparatus
Coil and coil feedthrough
Coil configurations for improved uniformity in inductively coupl
Combined CMP and plasma etching wafer flattening system
Compact microwave downstream plasma system
Compliant grinding wheel
Composite pallet
Composite shadow ring assembled with dowel pins and method...
Composite shadow ring assembled with dowel pins and method...
Computer aided printer-etcher
Conductive collar surrounding semiconductor workpiece in...
Conduit and method of forming
Configurable plasma volume etch chamber