Composite shadow ring assembled with dowel pins and method...

Details Composite shadow ring assembled with dowel pins and method... Composite shadow ring assembled with dowel pins and method...

2008-07-08

2008-07-08

Kackar, Ram N (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C156S915000, C156S345520, C156S345530, C156S345540, C118S728000, C118S725000, C118S724000

Reexamination Certificate

active

10164986

ABSTRACT:
A composite shadow ring that is constructed of an upper ring and a lower ring assembled together by a plurality of dowel pins and a method for using the ring. The upper ring and the lower ring each has a predetermined outside diameter that is substantially the same, a planar top surface and a planer bottom surface parallel to the planar top surface. Each of the planar bottom surface of the upper ring and the planar top surface of the lower ring has at least two blind holes formed therein. A plurality of dowel pins are used to frictionally engage the at least two blind holes in the upper ring and the at least two blind holes in the lower ring.

REFERENCES:
patent: 5887733 (1999-03-01), Harvey et al.
patent: 6036587 (2000-03-01), Tolles et al.
patent: 6088985 (2000-07-01), Clark
patent: 6537625 (2003-03-01), Flach et al.

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