Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for passing discrete workpiece through plural...
Reexamination Certificate
2004-07-29
2008-10-07
Moore, Karla (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With means for passing discrete workpiece through plural...
C156S345240, C156S345310, C118S719000
Reexamination Certificate
active
07431795
ABSTRACT:
A method and apparatus for process integration in manufacture of a gate structure of a field effect transistor are disclosed. The method includes assembling an integrated substrate processing system having a metrology module and a vacuumed processing platform to perform controlled and adaptive plasma processes without exposing the substrate to a non-vacuumed environment.
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Krishnamurthy Ramesh
Kumar Ajay
Applied Materials Inc.
Moore Karla
Moser IP Law Group
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