Annular receptacle for a rotating carrier

Apparatus and process for controlling the temperature of a...

Apparatus for performing semiconductor processing on target...

Apparatus for performing semiconductor processing on target...

Apparatus for plasma process

Apparatus for processing a substrate

Article for use in a semiconductor processing chamber and...

Article holders that use gas vortices to hold an article in...

Chamber for high-pressure wafer processing and method for...

Chemical dispensing system for semiconductor wafer processing

Composite shadow ring assembled with dowel pins and method...

Composite shadow ring assembled with dowel pins and method...

Conductive collar surrounding semiconductor workpiece in...

Convex insert ring for etch chamber

Device for liquid treatment of wafer-shaped articles

Dry etching method and apparatus for use in the LCD device

Dual wafer load lock

Edge ring arrangements for substrate processing

Electrostatic chuck module and cooling system

Electrostatic chucking stage and substrate processing apparatus