Annular receptacle for a rotating carrier

Details Annular receptacle for a rotating carrier Annular receptacle for a rotating carrier

2006-05-30

2006-05-30

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C134S113000

Reexamination Certificate

active

07052577

ABSTRACT:
An annular receptacle is described, particularly for a rotating carrier for receiving a disk-shaped object such as a semiconductor.

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patent: 05102028 (1993-04-01), None
Partial English translation (computer generated) of DE 19807460.

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