Mask etch plasma reactor with cathode providing a uniform...
Mask etch processing apparatus
Method and apparatus for aligning a machine tool
Method and apparatus for an improved bellows shield in a...
Method and apparatus for improved focus ring
Method and apparatus for plasma processing
Method and apparatus for the compensation of edge ring wear...
Method for improving uniformity and reducing etch rate...
Method of holding substrate and substrate holding system
Method of holding substrate and substrate holding system
Method of holding substrate and substrate holding system
Method of holding substrate and substrate holding system
Methods and devices for monitoring and controlling thin film...
Moveable barrier for multiple etch processes
Multiple zone gas distribution apparatus for thermal control...