Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate
2004-12-20
2008-09-09
Kackar, Ram N. (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With workpiece support
C156S345470, C118S728000, C118S7230AN, C361S234000, C279S128000
Reexamination Certificate
active
07422656
ABSTRACT:
A dry etching step during the manufacturing of a substrate for a liquid crystal display (LCD) device is improved by placing the substrate at a predetermined distance away from the lower electrode to prevent damage of the substrate due to electrostatic formed therebetween. An insulating tape attached on the lower electrode provides electrostatic protection between the substrate and the lower electrode, so that the substrate is properly lifted off the lower electrode via the lifting pins of the lower electrode without electrostatic interference.
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Birch & Stewart Kolasch & Birch, LLP
Kackar Ram N.
LG Display Co. Ltd.
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