CMP uniformity
Coaxial plasma processing apparatus
Cobalt silicide etch process and apparatus
Coil and coil feedthrough
Coil configurations for improved uniformity in inductively coupl
Combined CMP and plasma etching wafer flattening system
Compact microwave downstream plasma system
Composite pallet
Computer aided printer-etcher
Conduit and method of forming
Confinement device for use in dry etching of substrate...
Construction of a chamber casing in a plasma etching system
Contaminant reduction improvements for plasma etch chambers
Continuous gas plasma etching apparatus
Control of etch selectivity
Controlled cleavage process using patterning
Convection transfer system
Corrosion resistant coating
Corrosion resistant component of semiconductor processing...
Corrosion-resistant aluminum nitride coating for a semiconductor