Convection transfer system

Details Convection transfer system Convection transfer system

1992-04-02

1994-05-10

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156640, 165 804, 165 805, 361689, 361699, 357 82, 357 83, 427 96, 4274301, 257714, 257716, H01L 2100

Patent

active

053104404

ABSTRACT:
A system provides for convective transferring of material between a workpiece and a flowing fluid which chemically reacts with the workpiece. A gap is formed between the workpiece and a facesheet. The fluid is fed to supply nozzles, travels a short distance within the gap adjacent to the facesheet and exits via return nozzles. The flow cross section and flow density facilitate convective transfer at a moderate flow rate and low fluid pressure. The system is also applicable for chemical transfer such as plating or etching printed circuit boards.

REFERENCES:
patent: 4557785 (1985-12-01), Ohkuma
patent: 4729060 (1988-03-01), Yamamoto
patent: 4748495 (1988-03-01), Kucharek
patent: 4758926 (1988-07-01), Herrell
patent: 5016090 (1991-03-01), Galyon
I.B.M. Technical Disclosure Bulletin, vol. 32, No. 5A Oct. 1989, pp. 153-154.
Motorola Technical Developments, vol. 7, Oct. 1987, pp. 22--23.

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