MEMS thermal actuator and method of manufacture
MEMS variable capacitor with stabilized electrostatic drive...
MEMS wafer level package
MEMS with flexible portions made of novel materials
Mercury-based quaternary alloys of infrared sensitive materials
Mesa structure photon detection circuit
Mesa-structure avalanche photodiode having a buried epitaxial ju
Metal film pattern and manufacturing method thereof
Metal gate engineering for surface P-channel devices
Metal gate engineering for surface p-channel devices
Metal gate engineering for surface P-channel devices
Metal oxide temperature monitor
Metal semiconductor metal photodetectors
Metal-gate thermocouple
Method and apparatus for a backsided and recessed optical...
Method and apparatus for a monolithic integrated MESFET and...
Method and apparatus for an actuator system having buried...
Method and apparatus for assembling an array of micro-devices
Method and apparatus for bending electrostatic switch
Method and apparatus for bending electrostatic switch