Support structure for a semiconductor pressure transducer
Surface acoustic wave apparatus
Surface acoustic wave device and method of producing the same
Surface acoustic wave device having a package including a...
Surface acoustic wave device incorporating single crystal LiNbO.
Surface micro-machined sensor with pedestal
Surface micromachined ultrasonic transducer
Surface shape recognition sensor
Surface shape recognition sensor and method of fabricating the s
Suspended membrane pressure sensing array
Suspended micromachined structure
Suspended moving channels and channel actuators for...
System and method of fabricating micro cavities
Systems and methods for acoustic sensing
Systems and methods for reduced stress anchors
Systems with high density packing of micromachines
Tape carrier, and test apparatus for the same
Temperature stable semiconductor bulk acoustic resonator
Thermally isolated membrane structure
Thin film accelerometer