Surface shape recognition sensor and method of fabricating the s

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

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257414, 257432, 257434, 257448, 257459, 257534, 382124, 382312, H01L 2982, H01L 310232, H01L 310203

Patent

active

060607564

ABSTRACT:
A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.

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patent: 5973623 (1999-10-01), Gupta et al.
patent: 5991467 (1999-11-01), Kamiko
patent: 6002786 (1999-12-01), Hallibert et al.
patent: 6011859 (2000-01-01), Kalnitsky et al.
FP12.3: A 390dpi Live Fingerprint Imager Based on Feedback Capacitive Sensing Scheme (P200-P201, P154-P155, P456), 1997 IEEE International Solid-State Circuits Conference.
Novel Fingerprint Scanning Arrays Using Polysilicon TFT's on Glass and Polymer Susbtrates, Electron Device Letters, vol 18, No 1, Jan. 1997.

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