Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2006-02-24
2009-02-24
Monbleau, Davienne (Department: 2893)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C438S050000
Reexamination Certificate
active
07495301
ABSTRACT:
A thin film structure including a conductive thin film provided on a substrate and configured to be displaced in response to an applied acceleration, a pair of electrode pads formed on the substrate such that the pair of electrode pads are disposed on respective sides of the thin film, and a nonconductive film covering a top surface of the thin film and the side of the thin film facing the electrode pads. A top surface of the conductive thin film being higher than top surfaces of the electrode pads.
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Horikawa Makio
Okumura Mika
Satou Kimitoshi
Mitsubishi Denki & Kabushiki Kaisha
Monbleau Davienne
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Roland Christopher M
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