Microelectromechanical device using resistive...
Microelectromechanical device with integrated conductive shield
Microelectromechanical devices and fabrication methods
Microelectromechanical flexible membrane electrostatic valve...
Microelectromechanical integrated microloading device
Microelectromechanical structures defined from silicon on...
Microelectromechanical switch
Microelectromechanical system
Microelectromechanical systems encapsulation process
Microelectromechanical systems having trench isolated...
Microelectromechanical systems having trench isolated...
Microelectromechanical tunneling gyroscope and an assembly...
Microelectronic device with anti-stiction coating
Microelectronic integrated sensor
Micromachine and method for manufacturing the same
Micromachined assembly with a multi-layer cap defining a cavity
Micromachined device with ground plane under sensor
Micromachined microphone and multisensor and method for...
Micromachined relay and method of forming the relay
Micromachined relay and method of forming the relay