Microelectronic device with anti-stiction coating

Details Microelectronic device with anti-stiction coating Microelectronic device with anti-stiction coating

2007-12-18

2007-12-18

Ngô, Ngân V. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S417000, C257S418000, C257SE29002

Reexamination Certificate

active

10998290

ABSTRACT:
One embodiment of a microelectronic device includes a movable plate including a lower surface, a bump positioned on the lower surface, and an anti-stiction coating positioned only on the bump.

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