Carrier head for workpiece planarization/polishing
Carrier head having location optimized vacuum holes
Carrier head having low-friction coating and planarizing...
Carrier head including a flexible membrane and a compliant backi
Carrier head including a flexible membrane and a compliant...
Carrier head of chemical mechanical polishing apparatus...
Carrier head to apply pressure to and retain a substrate
Carrier head to apply pressure to and retain a substrate
Carrier head vibration damping
Carrier head with a compressible film
Carrier head with a compressible film
Carrier head with a flexible membrane
Carrier head with a flexible membrane
Carrier head with a flexible membrane and adjustable edge...
Carrier head with a flexible membrane and an edge load ring
Carrier head with a flexible membrane for a chemical mechanical
Carrier head with a flexible membrane for a chemical mechanical
Carrier head with a flexible membrane for a chemical...
Carrier head with a flexible membrane for a chemical...
Carrier head with a flexible membrane for a chemical...