Carrier head to apply pressure to and retain a substrate

Details Carrier head to apply pressure to and retain a substrate Carrier head to apply pressure to and retain a substrate

1999-06-10

2000-04-18

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451285, 451288, 451398, B24B 500

Patent

active

060508825

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus has a plurality of independently movable rods. The rods both apply pressure a substrate and surround the substrate to provide a retainer.

REFERENCES:
patent: 5662518 (1997-09-01), James et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5733182 (1998-03-01), Muramatsu et al.
patent: 5888120 (1999-03-01), Doran

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