Carrier head vibration damping

Details Carrier head vibration damping Carrier head vibration damping

2007-08-14

2007-08-14

Eley, Timothy V. (Department: 3724)

Abrading

Work holder

Clamp

C451S286000, C451S398000

Reexamination Certificate

active

09975196

ABSTRACT:
A carrier head for chemical mechanical polishing that has a base having at least a portion formed of a polymer, a mounting assembly connected to the base having a surface for contacting a substrate, a retainer secured to the portion of the base to prevent the substrate from moving along the surface, and a dampening material secured between the retainer and the base.

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