Carrier head with a flexible membrane for a chemical mechanical

Details Carrier head with a flexible membrane for a chemical mechanical Carrier head with a flexible membrane for a chemical mechanical

1999-08-04

2000-08-22

Eley, Timothy V.

Abrading

Machine

Rotary tool

451388, B24B 2900

Patent

active

061063789

ABSTRACT:
A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the outer portion may be significantly less than the width of the middle portion. The carrier head may also includea flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.

REFERENCES:
patent: 4194324 (1980-03-01), Bonora et al.
patent: 4373991 (1983-02-01), Banks
patent: 4918869 (1990-04-01), Kitta
patent: 5081795 (1992-01-01), Tanaka et al.
patent: 5193316 (1993-03-01), Olmstead
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5230184 (1993-07-01), Bukhman
patent: 5377451 (1995-01-01), Leoni et al.
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5423716 (1995-06-01), Strasbaugh
patent: 5441444 (1995-08-01), Nakajima
patent: 5443416 (1995-08-01), Volodarsky et al.
patent: 5476414 (1995-12-01), Hirose et al.
patent: 5498199 (1996-03-01), Karlsrud et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5643053 (1997-07-01), Shendon
patent: 5643061 (1997-07-01), Jackson et al.
patent: 5651724 (1997-07-01), Kimura et al.
patent: 5681215 (1997-10-01), Sherwood et al.
patent: 5716258 (1998-02-01), Metcalf
patent: 5762539 (1998-06-01), Nakashiba et al.
patent: 5762544 (1998-06-01), Zuniga et al.
patent: 5795215 (1998-08-01), Guthrie et al.
patent: 5797789 (1998-08-01), Tanaka et al.
patent: 5803799 (1998-09-01), Volodarsky et al.
patent: 5839947 (1998-11-01), Kimura et al.
patent: 5851140 (1998-12-01), Barns et al.
patent: 5941758 (1999-08-01), Mack
patent: 5985094 (1999-11-01), Mosca
patent: 5989104 (1999-11-01), Kim et al.

Affiliated with

Also associated with

Rating

Carrier head with a flexible membrane for a chemical mechanical does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Carrier head with a flexible membrane for a chemical mechanical , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Carrier head with a flexible membrane for a chemical mechanical will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-574371