Carrier head with a compressible film

Details Carrier head with a compressible film Carrier head with a compressible film

2006-02-21

2006-02-21

Eley, Timothy V. (Department: 3724)

Abrading

Accessory

C451S288000, C451S398000

Reexamination Certificate

active

07001260

ABSTRACT:
A compressible film that is detachably securable to a surface of a rigid structure in the carrier head. The compressible film has a plurality of apertures positioned to create a non-uniform pressure distribution on a substrate during polishing so as to improve polishing uniformity. The apertures may be spaced and positioned to provide a pressure distribution on the substrate that is locally uniform but globally non-uniform.

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