Carrier head with a flexible membrane

Details Carrier head with a flexible membrane Carrier head with a flexible membrane

2006-05-09

2006-05-09

Wilson, Lee D. (Department: 3723)

Abrading

Machine

Rotary tool

C451S041000, C451S285000, C451S286000, C451S287000, C451S364000, C451S365000, C451S397000, C451S402000

Reexamination Certificate

active

07040971

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus is described. The carrier head has a base, a rigid body, a membrane and a pressurizing structure. The rigid body is movable relative to the base and includes a downwardly-extending projection. The membrane has a mounting surface for a substrate. The membrane extends below the base to provide a chamber between the base and the membrane. The pressurizing structure applies a downward pressure on the rigid body to cause a lower surface of the rigid body to press on an inner surface of the membrane.

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Notice of Reason(s) for Revocation, Japanese Patent No. 3439970, Opposition No. 2003-73483, May 10, 2005.

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