Abrading – Machine – Rotary tool
Patent
1997-12-31
2000-06-27
Rose, Robert A.
Abrading
Machine
Rotary tool
451398, 451388, B24B 722
Patent
active
06080050&
ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane, the lower surface of which provides a substrate-receiving surface. The carrier head includes a compliant backing member with a plurality of cells which contact an upper surface of the flexible membrane to improve vacuum-chucking of the substrate.
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Chen Hung
Zuniga Steven M.
Applied Materials Inc.
Rose Robert A.
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