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Catalytic reactive pad for metal CMP

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Chemical mechanical planarization or polishing pad with...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical planarization or polishing pad with...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Chemical mechanical polishing pad

Abrading – Flexible-member tool – per se – Laminate
Reexamination Certificate

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Chemical mechanical polishing pad

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Chemical mechanical polishing pad

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Chemical mechanical polishing pad

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad and chemical mechanical...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad and chemical mechanical...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad and methods of making and...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad having a process-dependent...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad having holes and or grooves

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad having improved groove...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad having wave shaped grooves

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Chemical mechanical polishing pad slurry distribution grooves

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Patent

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CMP pad having an overlapping stepped groove arrangement

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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CMP pad having isolated pockets of continuous porosity and a...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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CMP pad having overlaid constant area spiral grooves

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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CMP pad having unevenly spaced grooves

Abrading – Flexible-member tool – per se – Work face variegated or on projecting backing
Reexamination Certificate

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