Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2011-08-23
2011-08-23
Eley, Timothy V (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S550000
Reexamination Certificate
active
08002611
ABSTRACT:
A chemical mechanical polishing pad and method for chemical-mechanical polishing is provided, wherein the polishing pad has a plurality of first mesas and one or more second mesas defined on a surface thereof. The plurality of first mesas are generally distributed about the surface of the polishing pad, wherein each of the plurality of first mesas has a first surface area associated therewith. The one or more second mesas are associated with a center region of the polishing pad, wherein each of the one or more second mesas has a second surface area associated therewith. The second surface area is at least twice the first surface area.
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Chen Jingqiu
He Yanghua
Leng Yaojian
Brady III Wade J.
Eley Timothy V
Franz Warren L.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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