Chemical mechanical polishing pad slurry distribution grooves

Details Chemical mechanical polishing pad slurry distribution grooves Chemical mechanical polishing pad slurry distribution grooves

1997-08-19

1999-03-16

Morgan, Eileen P.

Abrading

Flexible-member tool, per se

Interrupted or composite work face

451285, 451528, 451287, 451533, B24B 100

Patent

active

058822518

ABSTRACT:
Provided is a chemical mechanical polishing pad having grooves in its polishing surface which have a sub-surface cross-sectional span greater than the grooves' surface opening span. In this way, the edges of the groove are undercut. This provides both increased groove volume for a given pad surface area and groove depth, and variable flexibility in the polishing pad's surface. Grooves in pads of the invention also typically include a neck region at the top of the groove, where the groove side walls are substantially parallel. This provides a margin for the pad to wear during polishing without affecting the pad's surface area. The invention also provides a method and apparatus for cutting grooves in a chemical mechanical polishing pad.

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Unknown Author, "About Bridgeport Machines", Company Information, http://www/bpt.com.

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