Chemical mechanical polishing pad and methods of making and...

Details Chemical mechanical polishing pad and methods of making and... Chemical mechanical polishing pad and methods of making and...

2007-08-15

2008-12-02

Nguyen, Dung Van (Department: 3723)

Abrading

Flexible-member tool, per se

Interrupted or composite work face

C451S532000, C451S041000

Reexamination Certificate

active

07458885

ABSTRACT:
Shape memory chemical mechanical polishing pads are provided, wherein the shape memory chemical mechanical polishing pads comprise a polishing layer in a densified state. Also provided are methods of making the shape memory chemical mechanical polishing pads and for using them to polish substrates.

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