MEMS resonator devices with a plurality of mass elements...

MEMS resonator devices with a plurality of mass elements...

MEMS resonator having an inner element and an outer element...

MEMS resonator having at least one resonator mode shape

MEMS resonator including main and sub movable beams, and...

MEMS resonator, a method of manufacturing thereof, and a...

MEMS resonators and method for manufacturing MEMS resonators

MEMS resonators having resonator bodies therein with...

MEMS ultrasonic device having a PZT and cMUT

MEMS-based quartz hybrid filters and a method of making the...

Method and apparatus for adjusting the resonant frequency of...

Method and apparatus for an acoustic wave filter

Method and apparatus for frequency tuning of a...

Method and apparatus for frequency tuning of a...

Method and apparatus for selectively blocking radio...

Method and arrangement for quantitative potential measurements o

Method and materials for tuning the center frequency of narrow-b

Method and system for wafer-level tuning of bulk acoustic...

Method and system for wafer-level tuning of bulk acoustic...

Method and system for wafer-level tuning of bulk acoustic...