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Planarized Cu cleaning for reduced defects

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarized passivation layer for semiconductor devices

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Planarized selective tungsten metallization system

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Planarized semiconductor interconnect topography and method...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarized semiconductor interconnect topography and method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Planarizing a semiconductor structure to form replacement...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Planarizing method employing hydrogenated silicon nitride...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Planarizing method for fabricating gate electrodes

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Planarizing method for forming FIN-FET device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Planarizing method of semiconductor wafer and apparatus thereof

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarizing pads, planarizing machines and methods for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarizing sacrificial oxide to improve gate critical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Planarizing solutions, planarizing machines and methods for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarizing solutions, planarizing machines and methods for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarizing solutions, planarizing machines, and methods for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarizing technique for multilayered substrates

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
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Plane decode/virtual sector architecture

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Plasma and electron beam etching device and method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma annealing of substrates to improve adhesion

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma ash for silicon surface preparation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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