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Apparatus and method for nanoscale pattern generation

Semiconductor device manufacturing: process – Masking
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Effect of substrate surface treatment on 193 NM resist...

Semiconductor device manufacturing: process – Masking – Radiation resist
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Gate pattern formation using a bottom anti-reflective coating

Semiconductor device manufacturing: process – Masking – Radiation resist
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Lateral-only photoresist trimming for sub-80 nm gate stack

Semiconductor device manufacturing: process – Masking – Radiation resist
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Manufacturing process for semiconductor device, photomask,...

Semiconductor device manufacturing: process – Masking – Radiation resist
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Manufacturing use of photomasks with an opaque pattern...

Semiconductor device manufacturing: process – Masking
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Mask design and method for controlled profile fabrication

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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Method and apparatus for adjusting feature size and position

Semiconductor device manufacturing: process – Masking – Step and repeat
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Method and apparatus for adjusting feature size and position

Semiconductor device manufacturing: process – Masking – Step and repeat
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Method and system for decreasing the spaces between wordlines

Semiconductor device manufacturing: process – Masking
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Method for etching an anti-reflective coating

Semiconductor device manufacturing: process – Masking – Radiation resist
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Method for fabricating positionally exact surface-wide...

Semiconductor device manufacturing: process – Masking
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Method for manufacturing semiconductor device using multiple...

Semiconductor device manufacturing: process – Masking
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Method of fabricating a feature in an integrated circuit...

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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Method of fabricating a vertically profiled electrode and...

Semiconductor device manufacturing: process – Masking – Radiation resist
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Method of fabricating next-to-minimum-size transistor gate using

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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Method of making integrated circuit with closely spaced...

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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Method to control critical dimension of a hard masked pattern

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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Methods for treating a deep-UV resist mask prior to gate...

Semiconductor device manufacturing: process – Masking
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Pattern design method for lithography C/H process

Semiconductor device manufacturing: process – Masking – Subphotolithographic processing
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