Micro-machined device structures having on and off-axis...

Micro-machined electromechanical system (MEMS) accelerometer...

Micro-machining

Micro-mechanically strained semiconductor film

Microactuator, method for making the same, and magnetic head...

Microbridge structure and method for forming a microstructure su

Microchannel-element assembly and preparation method thereof

Microcrystalline series photovoltaic element and process for...

Microelectromechanical (MEM) device including a spring...

Microelectromechanical (MEM) device with a protective cap...

Microelectromechanical device having a stiffened support...

Microelectromechanical structure and process of making same

Microelectromechanical switch

Microelectromechanical system and process of making the same

Microelectromechanical system based sensors, sensor arrays,...

Microelectromechanical system package and the method for...

Microelectromechanical systems component and method of...

Microelectromechanical systems having stored charge and...

Microelectromechanical systems structures and self-aligned...

Microelectronic assembly and method for forming the same