4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
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Multi-metal layer MEMS structure and process for making the...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Multi-scale cantilever structures having nano sized holes...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Multiple stage MEMS release for isolation of similar materials

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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