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Monitoring of nitrided oxide gate dielectrics by...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Monitoring system for determining progress in a fabrication...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Monitoring the reduction in thickness as material is removed...

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Multi beam scanning with bright/dark field imaging

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Multi beam scanning with bright/dark field imaging

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Multi beam scanning with bright/dark field imaging

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Negative bias critical dimension trim

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Optical intensity modifier

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Optical processing apparatus and optical processing method

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Optical techniques of measuring endpoint during the processing o

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Optical techniques of measuring endpoint during the...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Optimization of CMP process by detecting of oxide/nitride...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Optoelectronic packaging submount arrangement providing 90...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Organic light-emitting diode devices having reduced...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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PAA-based etchant, methods of using same, and resultant...

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Patterned recess formation using acid diffusion

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Personalized hardware

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Photovoltaic structure with a conductive nanowire array...

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Plasma control using dual cathode frequency mixing and...

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Plasma emission detection during lateral processing of...

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