Abrupt “delta-like” doping in Si and SiGe...
Adhesion of carbon doped oxides by silanization
Amorphization/templated recrystallization method for hybrid...
Amorphous and polycrystalline growing method for gallium...
Amorphous silicon crystallization method
Amorphous silicon crystallization method
Apparatus and method for forming a deposited film on a...
Apparatus and method for forming deposited film
Apparatus and method for transformation of substrate
Apparatus for depositing silicon-based thin film and method...
Apparatus for mass-producing silicon-based thin film and...
Atomic layer deposition metallic contacts, gates and...
Atomic layer deposition of metallic contacts, gates and...