4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor
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Elimination of dehydrogenation step when forming a silicon thin

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Enhanced crystallization of amorphous films

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Epitaxial growth of aligned AlGalnN nanowires by...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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