Multilayer interface in copper CMP for low K dielectric

Multilayer interlevel dielectrics using phosphorus-doped glass

Multilayer low reflectivity hard mask and process therefor

Multilayer metal structure for improved interconnect reliability

Multilayer metallization

Multilayer passivation process for forming air gaps within a...

Multilayer substrate

Multilayer wiring structure and semiconductor device having...

Multilayer wiring structure of semiconductor device, method...

Multilayer wiring substrate mounted with electronic...

Multilayer wiring substrate, and method of producing same

Multilayered cap barrier in microelectronic interconnect...

Multilayered copper structure for improving adhesion property

Multilayered diffusion barrier structure for improving...

Multilayered diffusion barrier structure for improving...

Multilayered interconnection substrate and process for fabricati

Multilayered through via

Multilevel copper interconnect with double passivation

Multilevel copper interconnects with low-k dielectrics and...

Multilevel electronic circuit and method of making the same