Silicon carbide barrier layers for porous low dielectric...
Silicon carbide cap layers for low dielectric constant...
Silicon carbide semiconductor device and method for...
Silicon carbide stop layer in chemical mechanical polishing...
Silicon carbide-based device contact and contact fabrication...
Silicon die with metal feed through structure
Silicon interconnect passivation and metallization process...
Silicon interposer producing method, silicon interposer and...
Silicon nitride--TEOS oxide, salicide blocking layer for deep su
Silicon oxide dielectric material with excess silicon as...
Silicon oxide liner for reduced nickel silicide bridging
Silicon oxycarbide, growth method of silicon oxycarbide...
Silicon oxynitride cap for fluorinated silicate glass film in in
Silicon wafer having through-wafer vias
Silicon-doped titanium wetting layer for aluminum plug
Silicon-rich block copolymers to achieve unbalanced vias
Silicon-rich nickel-silicide ohmic contacts for SiC...
Silicon-rich oxide for copper damascene interconnect...
Silver metallization by damascene method
Silver under-layers for electroless cobalt alloys