4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
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BPSG planarization method having improved planarity and reduced

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Buffer layer for selective SiGe growth for uniform nucleation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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