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Material removal with focused particle beams

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Measurement marks for e-beam projection mask and method of using

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Member for a mask film, process for producing a mask film...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Member used for charged beam processing apparatus, and mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Members for mask production, masks, and methods thereof for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Utility Patent

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Membrane and mask, and exposure apparatus using the mask, and de

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Membrane and reticle-pellicle apparatus with purged...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Membrane consisting of silicon carbide and silicon nitride, meth

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Membrane mask for electron beam lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Membrane mask for projection lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and a system for designing a photomask for use in manufac

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for a reflective mask that is inspected...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for a reflective mask that is inspected...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method and apparatus for allowing phase conflicts in phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for clean photomask handling

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method and apparatus for correcting defects in photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for coupling a pellicle assembly to a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for coupling a pellicle to a photomask...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for designing EB mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for designing photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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