Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-05-30
2006-05-30
Huff, Mark F. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C355S075000, C055S483000, C055S522000, C055S523000, C055S525000, C075S245000, C075S246000
Reexamination Certificate
active
07052809
ABSTRACT:
A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2while demonstrating a permeability of 3.5×10−12m2and a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 μm in diameter at 8.3 sccm/cm2with a permeability of 3.0×10−13m2and a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0E−13and 1.0E−11m2. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.
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International Organization for Standardization (ISO) 4022, Permeable Sintered Metal Materials—Determination of Fluid Permeability, including Annexes A & B, Second Edition, 1987, pp. 1-9.
Abbott Nathan
Vroman Christopher J.
Huff Mark F.
King Timothy J.
Mykrolis Corporation
Pillion John E.
Ruggles John
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