Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1992-03-11
1993-05-11
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430966, 378 34, 378 35, 428446, 428698, 501 92, 1566591, 156657, 2041921, G03F 900
Patent
active
052099962
ABSTRACT:
An X-ray transmitting homogeneous membrane suitable for use in a mask for X-ray lithography is disclosed which compositely consists of silicon carbide and silicon nitride in a specified molar proportion. The membrane can be prepared by depositing a film of a homogeneous composite of silicon carbide and silicon nitride on a silicon wafer as a substrate by sputering using a target which is also a sintered composite material of silicon carbide and silicon nitride. As compared with membranes of silicon carbide alone or silicon nitride alone, the inventive membrane is advantageous in respect of the high resistance against high-energy irradiation, chemicals and moisture as well as in respect of high visible-light transmission, especially, when the tensile stress within the membrane is in a specified range.
REFERENCES:
patent: 4560668 (1985-12-01), Hunold et al.
patent: 4608326 (1986-08-01), Neukermans et al.
patent: 4690790 (1987-09-01), Bates
patent: 4862490 (1989-08-01), Karnezos et al.
patent: 4971851 (1990-11-01), Neukermans et al.
patent: 4998267 (1991-05-01), Lee et al.
patent: 5005075 (1991-04-01), Kobayashi et al.
patent: 5093056 (1992-03-01), Miyamoto et al.
patent: 5098515 (1992-03-01), Kashida et al.
patent: 5101420 (1992-03-01), Kushibiki et al.
Neufeldt, V. and Guralink, D., "Webster's New World Dictionary", 1988, Webster's New World, p. 646 and p. 286.
Kashida Meguru
Kubota Yoshihiro
Nagata Yoshihiko
Bowers Jr. Charles L.
Neville Thomas R.
Shin-Etsu Chemical Co. , Ltd.
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