Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-06-28
2005-06-28
Huff, Mark F. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C428S014000, C355S075000
Reexamination Certificate
active
06911283
ABSTRACT:
A method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism are disclosed. A pellicle is coupled to a photomask with a non-distorting mechanism that is located on a pellicle frame opposite a thin film coupled to the pellicle frame. The non-distorting mechanism acts to reduce stress exerted on the photomask by the pellicle.
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Alpay Hakki Ufuk
Gordon Joseph Stephen
Hughes Gregory P.
Kalk Franklin Dean
Storm Glenn E.
DuPont Photomasks, Inc.
Huff Mark F.
Mohamedulla Saleha
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