Silicon naphthalocyanines and thin radiation sensitive coating f
Silicon naphthalocyanines with unsaturated ligands and optical r
Silicon resist for photolithography at short exposure...
Silicon-containing acetal protected polymers and...
Silicon-containing antireflective coating forming...
Silicon-containing compositions for spin-on ARC/hardmask...
Silicon-containing copolymer and photosensitive resin...
Silicon-containing film-forming composition,...
Silicon-containing polymer, negative type resist composition...
Silicon-containing polymer, resist composition and...
Silicon-containing polymer, resist composition and...
Silicon-containing polymer, resist composition and...
Silicon-containing polymers as resists
Silicon-containing resist for photolithography
Silicone coating formulations and planographic printing plates m
Silicone-compatible photoinitiators, and photosensitive mixtures
Silicone-containing film-forming composition,...
Siloxane compound, photoresist composition including the...
Silsesquioxane polymers, method of synthesis, photoresist compos
Silsesquioxane resin