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Methods of patterning resists and structures including the...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Methods of patterning using photomasks including shadowing...

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Methods of photo-processing photoresist

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Methods of simultaneous contact and metal lithography patterning

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Methods to pattern contacts using chromeless phase shift masks

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Methods utilizing antireflective coating compositions with...

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Micro-miniature structures and method of fabrication thereof

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Micro-pattern forming method for semiconductor device

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Microchannel plate and a method for manufacturing the same

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Microelectromechanical optical switch and method of...

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Microfluidic device and method of manufacturing the same

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Micromotors and methods of fabrication

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Millimeter wave device and method of making

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Millimeter wave device and method of making

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Mixtures of mono- and DI- or polyfunctional silanes as silylat

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Modification of 193 nm sensitive photoresist materials by...

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Modifying circuitry features in radiation sensitive layers...

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Monolayer longitudinal bias and sensor trackwidth definition for

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Monomer for forming organic anti-reflective coating layer,...

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Multi layer thin film wiring process featuring self-alignment of

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